Focused ion beams from liquid metal ion sources /
| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Taunton, Somerset, England : New York :
Research Studies Press ; Wiley,
[1991]
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| Series: | Electronic & electrical engineering research studies. Microengineering series ;
1. |
| Subjects: |
| Physical Description: | xi, 332 pages : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 086380120X (Research Studies Press Ltd.) 0471930881 (John Wiley & Sons Inc.) |