Materials and processes for microelectronic systems /

Bibliographic Details
Corporate Authors:	Symposium on Materials and Processes for Microelectronic Systems Anaheim, Calif., International Ceramic Science and Technology Congress
Other Authors:	Nair, K. M., Pohanka, R., Buchanan, R. C.
Format:	Conference Proceeding Book
Language:	English
Published:	Westerville, Ohio : American Ceramic Society, [1990]
Series:	Ceramic transactions ; v. 15.
Subjects:	Microelectronics > Materials > Congresses. Integrated circuits > Design and construction > Congresses. Ceramic materials > Congresses.

Description
Item Description:	"Proceedings of the Symposium on Materials and Processes for Microelectronic Systems held during the First International Ceramic Science and Technology Congress held in Anaheim, CA, on October 31-November 3, 1989"--Title page verso. Spine title: Microelectronic systems.
Physical Description:	viii, 733 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0944904319