Advanced processing and characterization technologies : fabrication and characterization of semiconductor optoelectronic devices and integrated circuits, Clearwater, FL, 1991 /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
American Institute of Physics,
1991.
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| Series: | American Vacuum Society series ;
10. AIP conference proceedings ; no. 227. |
| Subjects: |
| Physical Description: | xiii, 221 pages : illustrations ; 25 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0883189100 |