http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
10th Annual Symposium on Microlithography
proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California
Tenth Annual Symposium on Microlithography
Symposium on Microlithography 1990 : Sunnyvale, Calif.)
Includes bibliographical references and index.
Proceedings of SPIE--the International Society for Optical Engineering ; 1496