rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: 10th Annual Symposium on Microlithography
    sub title: proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California
  title info:
    title: Tenth Annual Symposium on Microlithography
  name:
    name part: Symposium on Microlithography 1990 : Sunnyvale, Calif.)
    role:
      role term: creator
  name:
    name part: BACUS International (Firm)
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 1991
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: v, 315 pages : illustrations ; 28 cm.
  note: sponsored by Bacus International.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    genre: Congresses
  subject:
    topic: Microlithography
    genre: Congresses
  subject:
    topic: Masks (Electronics)
    genre: Congresses
  classification: TK7871.85 .S965 1990
  classification: 621.381/52
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; 1496
  identifier: 0819406058
  identifier: 91060046
  record info:
    record content source: DLC
    record creation date: 910109
    record change date: 20150928093219.0
    record identifier: in00001029012