Surface conditioning of vacuum systems : Los Angeles, CA 1989 /
| Corporate Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York :
American Institute of Physics,
[1990]
|
| Series: | American Vacuum Society series ;
8. AIP conference proceedings ; no. 199. |
| Subjects: |
| Item Description: | "DOE CONF 8904230." "Topical Conference on Surface Conditioning of Vacuum Systems ... held April 3-5, 1989 in Los Angeles, CA ... sponsored by the Plasma Science and Technology Division and the Vacuum Technology Division of the American Vacuum Society"--P. vii. |
|---|---|
| Physical Description: | x, 167 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 0883187566 |