Surface conditioning of vacuum systems : Los Angeles, CA 1989 /

Bibliographic Details
Corporate Authors: Topical Conference on Surface Conditioning of Vacuum Systems, American Vacuum Society. Plasma Science and Technology Division, American Vacuum Society. Vacuum Technology Division
Other Authors: Langley, R. A. (Robert A.)
Format: Conference Proceeding Book
Language:English
Published: New York : American Institute of Physics, [1990]
Series:American Vacuum Society series ; 8.
AIP conference proceedings ; no. 199.
Subjects:
Description
Item Description:"DOE CONF 8904230."
"Topical Conference on Surface Conditioning of Vacuum Systems ... held April 3-5, 1989 in Los Angeles, CA ... sponsored by the Plasma Science and Technology Division and the Vacuum Technology Division of the American Vacuum Society"--P. vii.
Physical Description:x, 167 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0883187566