Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /
| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Pittsburgh, Pa. :
Materials Research Society,
[1990]
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| Series: | Materials Research Society symposia proceedings.
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| Subjects: |
| Physical Description: | xiii, 399 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558990569 |
| ISSN: | 02729172 ; |