Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors: Besmann, Theodore M., Gallois, Bernard M.
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1990]
Series:Materials Research Society symposia proceedings.
Subjects:
Description
Physical Description:xiii, 399 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558990569
ISSN:02729172 ;