Cover Image

Optical/laser microlithography IV : 6-8 March 1991, San Jose, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Pol, Victor
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1991]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1463.
Subjects:
Lasers > Industrial applications > Congresses.
Optical instruments > Congresses.
Microlithography > Congresses.
Description
Physical Description:xii, 754 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819405620