APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers & Pol, V. (1991). Optical/laser microlithography IV: 6-8 March 1991, San Jose, California. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Victor Pol. Optical/laser Microlithography IV: 6-8 March 1991, San Jose, California. Bellingham, Wash., USA: SPIE, 1991.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Victor Pol. Optical/laser Microlithography IV: 6-8 March 1991, San Jose, California. SPIE, 1991.