Thin film processes II /
| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boston :
Academic Press,
[1991]
|
| Subjects: |
| Physical Description: | xiii, 866 pages : illustrations |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0127282513 (alk. paper) |