Micro system technologies 90 : 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components, Berlin, 10-13 September 1990 /

Bibliographic Details
Other Authors: Reichl, H. (Herbert)
Format: Book
Language:English
Published: Berlin ; New York : Springer-Verlag, [1990]
Subjects:
Description
Item Description:Includes index.
Physical Description:xv, 858 pages : illustrations
ISBN:3540530258
0387530258