Micro system technologies 90 : 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components, Berlin, 10-13 September 1990 /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer-Verlag,
[1990]
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| Subjects: |
| Item Description: | Includes index. |
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| Physical Description: | xv, 858 pages : illustrations |
| ISBN: | 3540530258 0387530258 |