Rapid thermal annealing/chemical vapor deposition and integrated processing : symposium held April 25-28, 1989, San Diego, California, U.S.A. /
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Pittsburgh, Pa. :
Materials Research Society,
[1989]
|
| Series: | Materials Research Society symposia proceedings.
|
| Subjects: |
| Physical Description: | xi, 494 pages : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1558990194 |