rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Rapid thermal and related processing techniques
    sub title: 2-3 October 1990, Santa Clara, California
  name:
    name part: Singh, Rajendra.
  name:
    name part: Moslehi, Mehrdad M.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 1991
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: ix, 422 pages : illustrations ; 28 cm.
  note: Rajendra Singh, Mehrdad M. Moslehi, chairs / editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Manufacturing processes
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1393
  identifier: 0819404624 (pbk.)
  identifier: 90050809
  record info:
    record content source: AZU
    record creation date: 910425
    record change date: 20150927181241.0
    record identifier: in00000996504