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Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : proceedings /

Bibliographic Details
Corporate Authors: IEEE Robotics and Automation Council, IEEE Worskshop on Micro Electro Mechanical Systems
Format: Conference Proceeding Book
Language:English
Published: Piscataway, NJ : Institute of Electrical and Electronics Engineers, 1989.
Subjects:
Electromechanical devices > Congresses.
Miniature objects > Congresses.
Microelectronics > Congresses.
Robotics > Congresses.
Description
Item Description:Papers presented at the second IEEE Workshop on Micro Electro Mechanical Systems.
"IEEE catalog number 89TH0249-3."
Physical Description:xii, 156 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographies.