Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors: Gross, Mihal E., Jasinski, Joseph M., Yates, John T., 1935-
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1989]
Series:Materials Research Society symposia proceedings.
Subjects:
Description
Physical Description:xv, 642 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558990046
ISSN:0272-9172 ;