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Planar processing primer /

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Bibliographic Details
Main Author: Anner, George E.
Format: Book
Language:English
Published: New York, N.Y. : Van Nostrand Reinhold, [1990]
Subjects:
Semiconductors > Design and construction.
Integrated circuits > Very large scale integration > Design and construction.
Description
Physical Description:634 pages : illustrations
Bibliography:Includes bibliographical references and index.
ISBN:0442206577