APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers & MacDonald, S. A. (1988). Advances in resist technology and processing V: 29 February-2 March, 1988, Santa Clara, California. SPIE--the International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Scott A. MacDonald. Advances in Resist Technology and Processing V: 29 February-2 March, 1988, Santa Clara, California. Bellingham, Wash., USA: SPIE--the International Society for Optical Engineering, 1988.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Scott A. MacDonald. Advances in Resist Technology and Processing V: 29 February-2 March, 1988, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1988.