SEM microcharacterization of semiconductors /
| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
London [England] ; San Diego, CA :
Academic,
[1989]
|
| Series: | Techniques of physics ;
12. |
| Subjects: |
| Physical Description: | xiii, 452 pages : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0123538556 : |