rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Optical/laser microlithography III
    sub title: 7-9 March 1990, San Jose, California
  title info:
    title: Optical/laser microlithography 3
  title info:
    title: Optical/laser microlithography three
  name:
    name part: Pol, Victor.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 1990
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: x, 586 pages : illustrations ; 28 cm.
  note: Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Lasers
    topic: Industrial applications
    genre: Congresses
  subject:
    topic: Optical instruments
    genre: Congresses
  subject:
    topic: Microlithography
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 1264
  identifier: 0819403113
  identifier: 90060894
  record info:
    record content source: TXA
    record creation date: 900705
    record change date: 20150925124831.0
    record identifier: in00000928354