http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Handbook of plasma processing technology
fundamentals, etching, deposition, and surface interactions
xxiii, 523 pages : illustrations ; 25 cm
edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.
Includes bibliographical references and index.
Materials science and process technology series