Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
[1990]
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| Series: | Materials science and process technology series.
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| Subjects: |
| Physical Description: | xxiii, 523 pages : illustrations ; 25 cm |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0815512201 : |