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Particle control for semiconductor manufacturing /

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Bibliographic Details
Other Authors: Donovan, R. P.
Format: Book
Language:English
Published: New York : M. Dekker, [1990]
Subjects:
Semiconductors > Design and construction.
Semiconductors > Defects.
Particles.
Description
Item Description:Updated revision of the course notes distributed at a short course held on Apr. 19-21, 1988, in Research Triangle Park, N.C.
Physical Description:xiii, 464 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0824782429 (alk. paper)