APA (7th ed.) Citation

Donovan, R. P. (1990). Particle control for semiconductor manufacturing. M. Dekker.

Chicago Style (17th ed.) Citation

Donovan, R. P. Particle Control for Semiconductor Manufacturing. New York: M. Dekker, 1990.

MLA (9th ed.) Citation

Donovan, R. P. Particle Control for Semiconductor Manufacturing. M. Dekker, 1990.

Warning: These citations may not always be 100% accurate.