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IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.

Bibliographic Details
Corporate Authors: IEEE Components, Hybrids, and Manufacturing Technology Society, IEEE Electron Devices Society, IEEE Reliability Society, IEEE Solid-State Circuits Council, Institute of Electrical and Electronics Engineers
Format: Journal
Language:English
Published: New York, N.Y. : Institute of Electrical and Electronics Engineers, [1988-]
Subjects:
Semiconductors > Design and construction > Periodicals.
Online Availability: Check for online availability
Description
Published:Vol. 1, no. 1 (Feb. 1988)-
Item Description:Title from cover.
"A publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council."
Physical Description:volumes : illustrations ; 28 cm.
Available in microfiche and microfilm.
Also available by subscription via the World Wide Web.
Publication Frequency:Quarterly
ISSN:0894-6507