rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Plasma etching
    sub title: an introduction
  name:
    name part: Manos, Dennis M.
  name:
    name part: Flamm, Daniel L.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: mau
    date issued: 1989
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xii, 476 pages : illustrations ; 24 cm.
  note: edited by Dennis M. Manos, Daniel L. Flamm.
  note: Includes bibliographical references and index.
  subject:
    topic: Plasma etching
  classification: TA2020 .P5 1989
  classification: 621.044
  related item:
    title info:
      title: Plasma--materials interactions
  identifier: 0124693709 (alk. paper)
  identifier: 87037419
  record info:
    record content source: DLC
    record creation date: 880105
    record change date: 20151017065345.0
    record identifier: in00000792094