Cover Image

Plasma etching : an introduction /

Bibliographic Details
Other Authors: Manos, Dennis M., Flamm, Daniel L.
Format: Book
Language:English
Published: Boston : Academic Press, [1989]
Series:Plasma--materials interactions.
Subjects:
Plasma etching.
Description
Physical Description:xii, 476 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0124693709 (alk. paper)