Diffusion phenomena in thin films and microelectronic materials /
| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
[1988]
|
| Series: | Materials science and process technology series.
|
| Subjects: |
| Physical Description: | xvi, 588 pages : illustrations |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0815511671 : |