Silicon nitride in electronics /
| Other Authors: | Belyĭ, V. I. (Vi͡acheslav Ivanovich), 1938-, Rzhanov, Anatoliĭ Vasilʹevich |
|---|---|
| Format: | Book |
| Language: | English Russian |
| Published: |
Amsterdam ; New York :
Elsevier,
1988.
|
| Series: | Materials science monographs ;
34. |
| Subjects: |
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