Silicon nitride in electronics /

Bibliographic Details
Other Authors:	Belyĭ, V. I. (Vi͡acheslav Ivanovich), 1938-, Rzhanov, Anatoliĭ Vasilʹevich
Format:	Book
Language:	English Russian
Published:	Amsterdam ; New York : Elsevier, 1988.
Series:	Materials science monographs ; 34.
Subjects:	Microelectronics > Materials. Silicon nitride.

Description
Physical Description:	viii, 263 pages : illustrations ; 25 cm.
Bibliography:	Includes bibliographies and index.
ISBN:	0444426892