Cover Image

Lithography in microelectronics /

Bibliographic Details
Other Authors: Makhviladze, T. M. (Editor)
Format: Book
Language:English
Published: Commack, NY : Nova Science Publishers, 1989.
Series:Trudy Instituta obshcheĭ fiziki. v.8.
Subjects:
Microelectronics.
Description
Physical Description:x, 207 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0941743306 :