Microelectronic processing : an introduction to the manufacture of integrated circuits /

Bibliographic Details
Main Author: Ruska, W. Scot (Walter Scot)
Format: Book
Language:English
Published: New York : McGraw-Hill, [1987]
Series:McGraw-Hill series in electrical engineering.
Subjects:
Description
Physical Description:xviii, 430 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographies and index.
ISBN:0070542805 (text)
0070542813 (solutions manual)