Microelectronic processing : an introduction to the manufacture of integrated circuits /
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| Format: | Book |
| Language: | English |
| Published: |
New York :
McGraw-Hill,
[1987]
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| Series: | McGraw-Hill series in electrical engineering.
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| Subjects: |
| Physical Description: | xviii, 430 pages : illustrations ; 25 cm. |
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| Bibliography: | Includes bibliographies and index. |
| ISBN: | 0070542805 (text) 0070542813 (solutions manual) |