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Ionized-cluster beam deposition and epitaxy /

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Bibliographic Details
Main Author: Takagi, Toshinori
Format: Book
Language:English
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, [1988]
Subjects:
Thin film devices > Design and construction.
Epitaxy.
Description
Item Description:Includes index.
Physical Description:viii, 231 pages : illustrations ; 26 cm.
Bibliography:Bibliography: pages 218-228.
ISBN:081551168X :