Cover Image

Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California /

Bibliographic Details
Corporate Authors: Optical Society of America, Society of Photo-optical Instrumentation Engineers, Metallurgical Society (U.S.)
Other Authors: Glembocki, O. J., Pollak, Fred H., Ponce, Fernando
Format: Book
Language:English
Published: Bellingham, Wash., U.S.A. : The Society, [1988]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 946.
Subjects:
Semiconductors > Testing > Congresses.
Spectrum analysis > Congresses.
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/0946.toc?SSO=1
Description
Physical Description:viii, 234 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographies and index.
ISBN:0892529814