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Optical/laser microlithography : 2-4 March 1988, Santa Clara, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Lin, Burn Jeng, 1942-
Format:	Book
Language:	English
Published:	Bellingham, Wash., U.S.A. : The Society, [1988]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 922.
Subjects:	Microlithography > Congresses. Lasers > Industrial applications > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/0922.toc

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