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| LEADER |
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| 001 |
in00000755513 |
| 005 |
20230411185651.8 |
| 008 |
880922s1988 waua b 101 0 eng d |
| 010 |
|
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|a 88060781
|
| 020 |
|
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|a 0892529571 (pbk.) :
|c $55.25
|
| 035 |
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|a (OCoLC)18515102
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| 035 |
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4 |
|a TK7874
|b .O68 1988
|
| 245 |
0 |
0 |
|a Optical/laser microlithography :
|b 2-4 March 1988, Santa Clara, California /
|c Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
|
| 264 |
|
1 |
|a Bellingham, Wash., U.S.A. :
|b The Society,
|c [1988]
|
| 264 |
|
4 |
|c ©1988
|
| 300 |
|
|
|a viii, 486 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
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|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings of SPIE--The International Society for Optical Engineering ;
|v v. 922
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microlithography
|v Congresses.
|
| 650 |
|
0 |
|a Lasers
|x Industrial applications
|v Congresses.
|
| 700 |
1 |
|
|a Lin, Burn Jeng,
|d 1942-
|
| 710 |
2 |
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|a Society of Photo-optical Instrumentation Engineers.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 922.
|
| 856 |
4 |
1 |
|u https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/0922.toc
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|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
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|e TK7874 .O68 1988
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|m A14811673643
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