Cover Image

Optical/laser microlithography : 2-4 March 1988, Santa Clara, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Lin, Burn Jeng, 1942-
Format: Book
Language:English
Published: Bellingham, Wash., U.S.A. : The Society, [1988]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 922.
Subjects:
Microlithography > Congresses.
Lasers > Industrial applications > Congresses.
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/0922.toc
Description
Physical Description:viii, 486 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0892529571 (pbk.) :