Advanced processing of semiconductor devices II : 17-18 March 1988, Newport Beach, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Metallurgical Society (U.S.), Symposium on Advances in Semiconductors and Superconductors: Physics and Device Applications
Other Authors: Craighead, Harold G., Narayan, J. (Jagdish)
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Wash., USA : SPIE--The International Society for Optical Engineering, 1988.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 945.
Subjects:
Description
Item Description:One of seven peer-reviewed proceedings resulting from the 1988 Symposium on Advances in Semiconductors and Superconductors: Physics and Device Applications.
Physical Description:viii, 164 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0892529806