Advanced processing of semiconductor devices II : 17-18 March 1988, Newport Beach, California /
| Corporate Authors: | , , |
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| Other Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE--The International Society for Optical Engineering,
1988.
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 945. |
| Subjects: |
| Item Description: | One of seven peer-reviewed proceedings resulting from the 1988 Symposium on Advances in Semiconductors and Superconductors: Physics and Device Applications. |
|---|---|
| Physical Description: | viii, 164 pages : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0892529806 |