rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Chemical vapor deposition for microelectronics
    sub title: principles, technology, and applications
  name:
    name part: Sherman, Arthur
    name part: 1931-
    role:
      role term: creator
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nju
    date issued: 1987
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xi, 215 pages : illustrations ; 25 cm.
  note: by Arthur Sherman.
  note: Includes bibliographies and index.
  subject:
    topic: Vapor-plating
  subject:
    topic: Integrated circuits
    topic: Design and construction
  classification: TS695 .S54 1987
  classification: 621.381/7
  related item:
    title info:
      title: Materials science and process technology series
  identifier: 0815511361 :
  identifier: 87011277
  record info:
    record content source: DLC
    record creation date: 870422
    record change date: 20151016162859.0
    record identifier: in00000751374