SiO2 and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors:	Pantelides, Sokrates T., Lucovsky, G.
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1988]
Series:	Materials Research Society symposia proceedings.
Subjects:	Microelectronics > Materials > Congresses. Silicon > Congresses.

Description
Item Description:	On title page "2" is subscript.
Physical Description:	ix, 329 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographies and indexes.
ISBN:	0931837731
ISSN:	0272-9172 ;