Cover Image

Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors: Sturm, James C.
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1988]
Series:Materials Research Society symposia proceedings.
Subjects:
Semiconductors > Design and construction > Congresses.
Ion implantation > Congresses.
Description
Physical Description:xvii, 524 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographies and indexes.
ISBN:0931837758
ISSN:0272-9172 ;