Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California /
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE--the International Society for Optical Engineering,
[1988]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 921. |
| Subjects: |
| Physical Description: | viii, 458 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographies and index. |
| ISBN: | 0892529563 |