Cover Image

Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. /

Bibliographic Details
Corporate Author: Materials Research Society
Other Authors: Wittmer, Marc, Stimmell, James, Strathman, Michael
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1986]
Series:Materials Research Society symposia proceedings. v. 71.
Subjects:
Microelectronics > Materials > Congresses.
Description
Physical Description:xvii, 535 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographies and indexes.
ISBN:0931837375 :
ISSN:0272-9172 ;