APA (7th ed.) Citation

Materials Research Society, Wittmer, M., Stimmell, J., & Strathman, M. (1986). Materials issues in silicon integrated circuit processing: Symposium held April 15-18, 1986, Palo Alto, California, U.S.A. Materials Research Society.

Chicago Style (17th ed.) Citation

Materials Research Society, Marc Wittmer, James Stimmell, and Michael Strathman. Materials Issues in Silicon Integrated Circuit Processing: Symposium Held April 15-18, 1986, Palo Alto, California, U.S.A. Pittsburgh, Pa.: Materials Research Society, 1986.

MLA (9th ed.) Citation

Materials Research Society, et al. Materials Issues in Silicon Integrated Circuit Processing: Symposium Held April 15-18, 1986, Palo Alto, California, U.S.A. Materials Research Society, 1986.