Cover Image

Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Author: Materials Research Society
Other Authors: Appleton, B. R., Eisen, Fred H., Sigmon, T. W.
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1985]
Series:Materials Research Society symposia proceedings. v. 45.
Subjects:
Semiconductors > Congresses.
Ion implantation > Congresses.
Description
Physical Description:xv, 393 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographies and indexes.
ISBN:0931837103 :
ISSN:0272-9172 ;