Cover Image

Ion and electron beams in micro-electronics (Engineering 823.9) /

Bibliographic Details
Corporate Author: California. University. Engineering and Physical Sciences Extension
Format: Book
Language:English
Published: [Los Angeles], [publisher not identified] ; 1970.
Subjects:
Microelectronics.
Ion bombardment.
Electron beams.
Description
Item Description:Cover title.
Physical Description:1 volume (various pagings) : illustrations
Bibliography:Includes bibliographies.