Cover Image

Glow discharge processes : sputtering and plasma etching /

Bibliographic Details
Main Author: Chapman, Brian N.
Format: Book
Language:English
Published: New York : Wiley, [1980]
Subjects:
Sputtering (Physics)
Glow discharges.
Description
Item Description:"A Wiley-Interscience publication."
Includes index.
Physical Description:xv, 406 pages : illustrations ; 24 cm.
Bibliography:Bibliography: pages 397-400.
ISBN:047107828X :