rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Proceedings of the Symposium on Etching for Pattern Definition
  name:
    name part: Symposium on Etching for Pattern Definition (1976 : Washington, D.C.)
    role:
      role term: creator
  name:
    name part: Hughes, Henry G.
  name:
    name part: Rand, Myron J.
  name:
    name part: Electrochemical Society
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: nju
    date issued: 1976
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: vi, 203 pages : illustrations ; 23 cm.
  note: edited by Henry G. Hughes, Myron J. Rand.
  note: Held at the spring, 1976, meeting of the Electrochemical Society.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    topic: Etching
    genre: Congresses
  subject:
    topic: Integrated circuits
    genre: Congresses
  subject:
    topic: Metals
    topic: Etching
    topic: Congresses
  classification: TK7836 .S94 1976
  classification: 621.3815/2
  identifier: 76009231
  record info:
    record content source: DLC
    record creation date: 761019
    record change date: 20151015051334.0
    record identifier: in00000610934