Proceedings of the Symposium on Etching for Pattern Definition /

Bibliographic Details
Corporate Authors:	Symposium on Etching for Pattern Definition Washington, D.C., Electrochemical Society
Other Authors:	Hughes, Henry G., Rand, Myron J.
Format:	Conference Proceeding Book
Language:	English
Published:	Princeton, N.J. : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, [1976]
Subjects:	Semiconductors > Etching > Congresses. Integrated circuits > Congresses. Metals > Etching > Congresses.

Description
Item Description:	Held at the spring, 1976, meeting of the Electrochemical Society.
Physical Description:	vi, 203 pages : illustrations ; 23 cm.
Bibliography:	Includes bibliographical references and index.