Cover Image

Lasers in microlithography : 2-3 March 1987, Santa Clara, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Ehrlich, Daniel J., Tsao, Jeffrey Y., Batchelder, John Samuel
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE--The International Society for Optical Engineering, [1987]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 774.
Subjects:
Microlithography > Congresses.
Lasers > Industrial applications > Congresses.
Lasers > Testing > Congresses.
Excimer lasers > Congresses.
Description
Item Description:Errata slip inserted.
Includes bibliographies and index.
Physical Description:v, 192 pages : illustrations ; 28 cm.
ISBN:0892528095