rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Layered structures and interface kinetics
    sub title: their technology and applications
  title info:
    title: Silicon-on-insulator
  name:
    name part: Furukawa, S. (Seijirō)
    name part: 1934-
  name:
    name part: National Science Foundation (U.S.)
  name:
    name part: Nihon Gakujutsu Shinkōkai
  name:
    name part: US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics" (1983 : Ōiso-machi, Japan)
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: ja
    date issued: 1985
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: viii, 369 pages : illustrations ; 24 cm.
  note: edited by S. Furukawa.
  note: "Papers presented in US-Japan Seminar on "Solid Phase Epitaxy and Inferface Kinetics" held in Oise, Japan, June 20-24, 1983 ... co-sponsored by the National Science Foundation and Japan Society for the Promotion of Science"--Pref.
  note: Companion volume containing the other papers presented at seminar published under title: Silicon-on-insulator.
  note: "ASST, advances in solid state technology."
  note: Includes bibliographies and index.
  subject:
    topic: Solid state electronics
    genre: Congresses
  subject:
    topic: Integrated circuits
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Layer structure (Solids)
  subject:
    topic: Epitaxy
    genre: Congresses
  classification: TK7871.85 .L35 1985
  classification: 621.381
  identifier: 902771939X
  identifier: 84027530
  record info:
    record content source: DLC
    record creation date: 841210
    record change date: 20151014055907.0
    record identifier: in00000574042