Plasma etching in semiconductor fabrication /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam ; New York :
Elsevier,
1985.
|
| Series: | Plasma technology ;
1. |
| Subjects: |
| Item Description: | Includes index. |
|---|---|
| Physical Description: | x, 316 pages : illustrations ; 25 cm. |
| Bibliography: | Bibliography: pages 303-311. |
| ISBN: | 0444424199 |